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KXR94-2353

型号：

KXR94-2353

描述：

为± 2克三轴数字加速度计技术指标[ ± 2g Tri-axis Digital Accelerometer Specifications ]

品牌：

ETC[ ETC ]

页数：

15 页

PDF大小：

442 K

下载PDF手册
PART NUMBER:  
± 2g Tri-axis Digital  
Accelerometer Specifications  
KXR94-2353  
Rev. 3  
Nov-2010  
Product Description  
The KXR94-2353 is a Tri-axis, silicon micromachined  
accelerometer with a full-scale output range of +/-2g (19.6  
m/s/s).  
The sense element is fabricated using Kionix’s  
proprietary plasma micromachining process technology.  
Acceleration sensing is based on the principle of a differential  
capacitance arising from acceleration-induced motion of the  
sense element, which further utilizes common mode  
cancellation to decrease errors from process variation,  
temperature, and environmental stress. The sense element is  
hermetically sealed at the wafer level by bonding a second  
silicon lid wafer to the device using a glass frit. A separate  
ASIC device packaged with the sense element provides signal  
conditioning and self-test. The accelerometer is delivered in a  
5 x 5 x 1.2 mm DFN plastic package operating from a 2.5 –  
5.25V DC supply.  
There are 4 factory programmable modes of operation for the KXR94:  
Mode 00 – The three outputs (X, Y, Z) are read through the digital SPI interface, which is also  
used to command Selftest and Standby Mode. The digital I/O pads are powered  
from a separate power pin, and will interface to 1.8V logic.  
Mode 01 – The three outputs (X, Y, Z) are provided on three analog output pins. The KXR94  
also features an integrated 3-channel multiplexer (X, Y, Z). The Enable pin must  
be high for normal operation and low for power shutdown.  
Mode 10 – The three outputs (X, Y, Z) are provided on three analog output pins. The KXR94  
also features an integrated 4-channel multiplexer (X, Y, Z, Aux In). The Enable  
pin must be high for normal operation and low for power shutdown.  
Mode 11 – The three outputs (X, Y, Z) are provided on three analog output pins. The KXR94  
also features an integrated 4-channel multiplexer (X, Y, Z, Aux In). The Enable  
pin must be low for normal operation and high for power shutdown.  
The KXR94-2353 is factory programmed to be in MODE 00.  
36 Thornwood Dr. – Ithaca, NY 14850  
tel: 607-257-1080 – fax:607-257-1146  
www.kionix.com - info@kionix.com  
© 2010 Kionix – All Rights Reserved  
352-1783-1011041430  
Page 1 of 15  
PART NUMBER:  
± 2g Tri-axis Digital  
Accelerometer Specifications  
KXR94-2353  
Rev. 3  
Nov-2010  
Functional Diagram  
Charge  
Amplifier  
X
Sensor  
Output X  
C2  
32K  
2
Temp  
Sensor  
Y
Output Y  
13  
32K  
32K  
Charge  
Amplifier  
1kHz  
LPF  
Sensor  
C3  
Z
Output Z  
Charge  
Amplifier  
14  
Sensor  
C4  
Oscillator  
8
12  
3
A/D  
Vdd  
GND  
GND  
4 Aux In  
SPI  
5
6
7
9
10  
IO Vdd  
SDO  
Enable  
SDI  
SCLK  
36 Thornwood Dr. – Ithaca, NY 14850  
tel: 607-257-1080 – fax:607-257-1146  
www.kionix.com - info@kionix.com  
© 2010 Kionix – All Rights Reserved  
352-1783-1011041430  
Page 2 of 15  
PART NUMBER:  
± 2g Tri-axis Digital  
Accelerometer Specifications  
KXR94-2353  
Rev. 3  
Nov-2010  
Product Specifications  
Table 1. Mechanical  
(specifications are for operation at 3.3V and T = 25C unless stated otherwise)  
Parameters  
Operating Temperature Range  
Zero-g Offset  
Units  
ºC  
Min  
Typical  
Max  
-
-40  
85  
!
!
counts  
mg/ºC  
counts/g  
1918  
2048  
0.2  
2178  
Zero-g Offset Variation from RT over Temp.  
Sensitivity  
803  
819  
835  
0.01 (xy)  
0.02 (z)  
4
Sensitivity Variation from RT over Temp.  
Offset Ratiometric Error (Vdd = 3.3V ± 5%)  
Sensitivity Ratiometric Error (Vdd = 3.3V ± 5%)  
%/ºC  
mg  
%
1.25 (xy)  
0.2 (z)  
0.1  
Non-Linearity  
Cross Axis Sensitivity1  
% of FS  
%
2
1.9 (xy)  
0.5 (z)  
800  
Self Test Output change on Activation  
g
Bandwidth (-3dB)2  
Hz  
Noise Density (on filter pins)  
g / √Hz  
45  
! Denotes Special Characteristics: These characteristics have been identified as important to the  
customer.  
Notes:  
1. Cross axis sensitivity is dominated by the placement accuracy of the component during PCB  
assembly and in the application.  
2. Bandwidth for internal low pass filter only. Lower frequencies are user definable with external  
capacitors. (See Application Design Equations)  
36 Thornwood Dr. – Ithaca, NY 14850  
tel: 607-257-1080 – fax:607-257-1146  
www.kionix.com - info@kionix.com  
© 2010 Kionix – All Rights Reserved  
352-1783-1011041430  
Page 3 of 15  
PART NUMBER:  
± 2g Tri-axis Digital  
Accelerometer Specifications  
KXR94-2353  
Rev. 3  
Nov-2010  
Table 2. Electrical  
(specifications are for operation at 3.3V and T = 25C unless stated otherwise)  
Parameters  
Operating  
Units  
V
V
Min  
Typical  
Max  
Supply Voltage (Vdd)  
2.5  
1.7  
3.3  
-
5.25  
Vdd  
I/O Pads Supply Voltage (VIO)  
Operating  
Current Consumption  
Standby  
!
A
500  
950  
1400  
A
-
-
5
Input Low Voltage  
V
-
0.2 * VIO  
-
Input High Voltage  
V
0.8 * VIO  
-
Input Pull-down Current  
A/D Conversion time  
SPI Communication Rate  
60  
40  
A
s
MHz  
5
Analog Output Resistance(Rout  
)
24  
32  
40  
k
! Denotes Special Characteristics: These characteristics have been identified as important to the  
customer.  
Table 3. Environmental  
Parameters  
Units  
Min  
-0.3  
-40  
-55  
-
Target  
Max  
7.0  
Supply Voltage (Vdd) Absolute Limits  
Maximum Operating Temperature Range  
Storage Temperature Range  
V
ºC  
ºC  
g
-
-
-
-
-
125  
150  
Mech. Shock (powered and unpowered)  
5000 for 0.5ms  
3000  
ESD  
HBM  
V
-
Caution: ESD Sensitive and Mechanical Shock Sensitive Component, improper handling can  
cause permanent damage to the device.  
This product conforms to Directive 2002/95/EC of the European Parliament and of the Council of the  
European Union (RoHS). Specifically, this product does not contain lead, mercury, cadmium,  
hexavalent chromium, polybrominated biphenyls (PBB), or polybrominated diphenyl ethers (PBDE)  
above the maximum concentration values (MCV) by weight in any of its homogenous materials.  
Homogenous materials are "of uniform composition throughout."  
36 Thornwood Dr. – Ithaca, NY 14850  
tel: 607-257-1080 – fax:607-257-1146  
www.kionix.com - info@kionix.com  
© 2010 Kionix – All Rights Reserved  
352-1783-1011041430  
Page 4 of 15  
PART NUMBER:  
± 2g Tri-axis Digital  
Accelerometer Specifications  
KXR94-2353  
Rev. 3  
Nov-2010  
This product is halogen-free per IEC 61249-2-21. Specifically, the materials used in this product  
contain a maximum total halogen content of 1500 ppm with less than 900-ppm bromine and less than  
900-ppm chlorine.  
HF  
Soldering  
Soldering recommendations available upon request or from www.kionix.com.  
36 Thornwood Dr. – Ithaca, NY 14850  
tel: 607-257-1080 – fax:607-257-1146  
www.kionix.com - info@kionix.com  
© 2010 Kionix – All Rights Reserved  
352-1783-1011041430  
Page 5 of 15  
PART NUMBER:  
± 2g Tri-axis Digital  
Accelerometer Specifications  
KXR94-2353  
Rev. 3  
Nov-2010  
Application Schematic  
1
2
3
4
5
6
7
14  
13  
12  
Z
Y
X
C2  
C3  
C4  
11  
10  
9
KXR94  
Aux In  
IO Vdd  
SDO  
SDI  
nCS  
Vdd  
8
SCLK  
C1  
Table 4. KXR94 Pad Descriptions  
Pad Name  
Description  
Not Connected Internally (can be connected to Vdd or Gnd)  
1
NC  
Analog output of the x-channel. Optionally, a capacitor (C2) placed between this pin and ground will form a  
low pass filter.  
2
X output  
3
4
5
6
7
GND  
Aux In  
IO Vdd  
SDO  
SCLK  
Vdd  
Ground  
Auxiliary input for analog-digital converter  
Power Supply for I/O pads  
SPI Serial Data Output  
SPI Communication Clock  
8
The power supply input. Decouple this pin to ground with a 0.1uF ceramic capacitor (C1).  
9
nCS  
SPI Chip Select  
10  
11  
12  
SDI  
NC  
GND  
SPI Serial Data Input  
Not Connected Internally (can be connected to Vdd or Gnd)  
Ground  
Analog output of y-channel. Optionally, a capacitor (C3)placed between this pin and ground will form a low  
pass filter.  
Analog output of z-channel. Optionally, a capacitor (C4) placed between this pin and ground will form a low  
pass filter.  
13  
14  
Y Output  
Z Output  
Center  
pad  
Ground  
36 Thornwood Dr. – Ithaca, NY 14850  
tel: 607-257-1080 – fax:607-257-1146  
www.kionix.com - info@kionix.com  
© 2010 Kionix – All Rights Reserved  
352-1783-1011041430  
Page 6 of 15  
PART NUMBER:  
± 2g Tri-axis Digital  
Accelerometer Specifications  
KXR94-2353  
Rev. 3  
Nov-2010  
Application Design Equations  
The bandwidth is determined by the internal 1kHz low pass filter. The user can lower the bandwidth by placing  
filter capacitors connected from pins 2, 13 and 14 to ground. The response is single pole. Given a desired  
bandwidth, fBW, the filter capacitors are determined by:  
4.97x10  
C2 C3 C4  
fBW  
KXR94 Digital Interface  
The Kionix KXR94 digital accelerometer has the ability to communicate on a SPI digital serial interface bus.  
This flexibility allows for easy system integration by eliminating analog-to-digital converter requirements and by  
providing direct communication with system micro-controllers.  
The serial interface terms and descriptions as indicated in Table 6 below will be observed throughout this  
document.  
Table 5. Serial Interface Terminologies  
Term  
Transmitter  
Receiver  
Master  
Description  
The device that transmits data to the bus.  
The device that receives data from the bus.  
The device that initiates a transfer, generates clock signals and terminates a transfer.  
The device addressed by the Master.  
Slave  
SPI Interface  
The KXR94 utilizes an integrated Serial Peripheral Interface (SPI) for digital communication. The SPI interface  
is primarily used for synchronous serial communication between one Master device and one or more Slave  
devices. The Master, typically a micro controller, provides the SPI clock signal (SCLK) and determines the  
state of Chip Select (nCS). The KXR94 always operates as a Slave device during standard Master-Slave SPI  
operation.  
SPI is a 4-wire synchronous serial interface that uses two control and two data lines. With respect to the  
Master, the Serial Clock output (SCLK), the Data Output (MOSI) and the Data Input (MISO) are shared among  
the Slave devices. The Master generates an independent Chip Select (nCS) for each Slave device that goes  
low at the start of transmission and goes back high at the end. The Slave Data Output (SDO) line, remains in  
a high-impedance (hi-z) state when the device is not selected, so it does not interfere with any active devices.  
This allows multiple Slave devices to share a master SPI port as shown in Figure 1 below.  
36 Thornwood Dr. – Ithaca, NY 14850  
tel: 607-257-1080 – fax:607-257-1146  
www.kionix.com - info@kionix.com  
© 2010 Kionix – All Rights Reserved  
352-1783-1011041430  
Page 7 of 15  
PART NUMBER:  
± 2g Tri-axis Digital  
Accelerometer Specifications  
KXR94-2353  
Rev. 3  
Nov-2010  
Master  
Slave  
Serial Clock  
SCLK  
CS0  
CS1  
CS  
KXR94  
MCU  
SDI  
SDO  
MOSI (Data Out)  
MISO (Data In)  
Slave  
SCLK  
CS  
KXR94  
SDO  
SDI  
Figure 1 KXR94 SPI Connections  
Control Register Write and Read  
The control register embedded in the KXR94 has an 8-bit address. Upon power up, the Master must write to  
the accelerometer’s control register to set its operational mode. On the falling edge of nCS, a 2-byte  
command is written to the control register. The first byte, 0x04, initiates the write to the appropriate register,  
and is followed by the user-defined, operational-mode byte. All commands are sent MSB (most significant bit)  
first, and the host must return nCS high for at least 200nS before the next data request. Figure 2 below shows  
the timing diagram for carrying out the 8-bit control register write operation.  
CLK  
0
0
0
0
0
1
0
0
D7 D6 D5 D4 D3 D2 D1 D0  
(MSB)  
SDI  
(MSB)  
HI-Z  
HI-Z  
SDO  
CS  
Figure 2 Timing Diagram for 8-Bit Control Register Write Operation  
36 Thornwood Dr. – Ithaca, NY 14850  
tel: 607-257-1080 – fax:607-257-1146  
www.kionix.com - info@kionix.com  
© 2010 Kionix – All Rights Reserved  
352-1783-1011041430  
Page 8 of 15  
PART NUMBER:  
± 2g Tri-axis Digital  
Accelerometer Specifications  
KXR94-2353  
Rev. 3  
Nov-2010  
In order to read the 8-bit control register, an 8-bit read command, 0x03, must be written to the accelerometer  
to initiate the read. Upon receiving the command, the accelerometer returns the 8-bit operational-mode data  
stored in the control register. This operation also occurs over 16 clock cycles. All returned data is sent MSB  
first, and the host must return nCS high for at least 200nS before the next data request. Figure 3 shows the  
timing diagram for an 8-bit control register read operation.  
CLK  
0
0
0
0
0
0
1
1
SDI  
(MSB)  
HI-Z  
HI-Z  
D7 D6 D5 D4 D3 D2 D1 D0  
(MSB)  
SDO  
CS  
Figure 3 Timing Diagram for 8-Bit Control Register Read Operation  
Accelerometer Read Back Operation  
The KXR94 has an onboard 12-bit ADC that can sample, convert and read back sensor data at any time.  
Transmission of an 8-bit axis-conversion command (see Table 8) begins on the falling edge of nCS. After the  
eight clock cycles used to send the command, the host must wait for at least 40µs during the A/D conversion  
time. Note that all returned data is sent MSB first. Once the data is received, nCS must be returned high for  
200nS before the next data request. Figure 4 and 5 this and on the following page show the timing and  
register diagrams for the accelerometer 12-bit ADC read operation.  
The Read Back Operation is a 3-byte SPI command. The first byte of SDI contains the command to convert  
one of the axes. The second and third bytes of SDO contain the 12 bits of the A/D result plus four bits of  
padding in the LSB to make a total of 16 bits. See Figure 5 on next page.  
Conversion  
CLK  
A7 A6 A5 A4 A3 A2 A1 A0  
(MSB)  
SDI  
HI Z  
HI Z  
D11 D10 D9 D8 D7 D6 D5 D4 D3 D2 D1 D0  
(MSB)  
SDO  
CS  
Figure 4 Timing Diagram for an A/D conversion and 12-Bit data read operation.  
36 Thornwood Dr. – Ithaca, NY 14850  
tel: 607-257-1080 – fax:607-257-1146  
www.kionix.com - info@kionix.com  
© 2010 Kionix – All Rights Reserved  
352-1783-1011041430  
Page 9 of 15  
PART NUMBER:  
± 2g Tri-axis Digital  
Accelerometer Specifications  
KXR94-2353  
Rev. 3  
Nov-2010  
Axis Conversion Command  
SDI  
A7 A6 A5 A4 A3 A2 A1 A0  
MSB  
X
X
X
X
X
X
X
X
X
X
X
X
X
X
X
X
X
X
X
MSB  
SDO  
X
X
X
X
X
X
X
X
D11D10 D9 D8 D7 D6 D5 D4  
D3 D2 D1 D0 X  
Conversion Read Back Data  
X = Don’t Care Bits  
Figure 5 Register Diagram for 12-Bit ADC Read Operation  
SPI Commands  
The accelerometer SPI interface uses an 8-bit command register to carry out all of its functions. The  
commands are given in Table 7.  
1st byte (SDI)  
Description  
Convert X axis  
(Command)  
0x00  
Convert Y axis  
0x01  
Convert Z axis  
0x02  
Read Control Register  
Write Control Register  
Convert Aux In  
0x03  
0x04  
0x07  
Table 6 Command Register Bit Utilization  
Convert X axis (0x00 or 0000 0000) samples the X-axis sensor data held on the filter cap,  
digitizes it and returns it as 12-bits through SDO.  
Convert Y axis (0x01 or 0000 0001) samples the Y-axis sensor data held on the filter cap,  
digitizes it and returns it as 12-bits through SDO.  
Convert Z axis (0x02 or 0000 0010) samples the Z-axis sensor data held on the filter cap,  
digitizes it and returns it as 12-bits through SDO.  
Read Control Register (0x03 or 0000 0011) reads back the current contents of the control  
register and returns it as 8-bits through SDO.  
Write Control Register (0x04 or 0000 0100) is used to initiate a write to the control register  
and set the operational mode of the accelerometer. The first byte initiates the write to the  
register, and the second byte specifies the operational mode.  
36 Thornwood Dr. – Ithaca, NY 14850  
tel: 607-257-1080 – fax:607-257-1146  
www.kionix.com - info@kionix.com  
© 2010 Kionix – All Rights Reserved  
352-1783-1011041430  
Page 10 of 15  
PART NUMBER:  
± 2g Tri-axis Digital  
Accelerometer Specifications  
KXR94-2353  
Rev. 3  
Nov-2010  
Convert Aux In (0x07 or 0000 0111) samples the auxiliary input data, digitizes it and returns it  
as 12-bits through SDO.  
Accelerometer Operational Modes  
The 8-bit read/write control register selects the various operational modes of the accelerometer. Table 8  
shows the bit assignments for the available modes.  
D7  
D6  
D5  
D4  
D3  
D2  
D1  
D0  
0
0
0
0
0
Enable  
Self test  
Parity  
Table 7 Read/Write Control Register  
Parity reports on even (0) or odd (1) EEPROM parity. A properly functioning part will return  
even (0) EEPROM parity. This bit is read-only and operates independently of the other modes.  
Enable powers up the accelerometer for operation.  
Enable = 1 – normal operation  
Enable = 0 – low-power standby  
Self test activates the self-test function for the sensor elements on all three axes. A correctly  
functioning part will increase all channel outputs by approximately 1g when Self test = 1 and  
Enable = 1. This bit can be read or written.  
Digital Accelerometer SPI Sequence  
An example of a SPI sequence for reading sensor data is as follows:  
1. Power up KXR94  
2. nCS low to select  
3. Write operational mode command to 8-bit control register – for example: 0x0404. The first 0x04 is the  
command to write to the control register, the second 0x04 sets the enable bit in the internal register.  
4. nCS high for at least 200nS (SCLK = 5MHz)  
5. nCS low to select  
6. Send convert axis command – for example: 0x000000. The first 0x00 is the command to convert the  
X-channel. The second and third 0x00 are placeholders. There should be a minimum of 40μs  
between the first and second bytes in order to give the A/D conversion adequate time to complete.  
7. The 12-bit A/D data is read in on the second and third SDO bytes.  
8. nCS high for at least 200nS (SCLK = 5MHz)  
9. Repeat data read cycle. Recommend reading X-axis, Y-axis, Z-axis, and the Control Register for each  
read cycle to verify the Control Register mode selection.  
36 Thornwood Dr. – Ithaca, NY 14850  
tel: 607-257-1080 – fax:607-257-1146  
www.kionix.com - info@kionix.com  
© 2010 Kionix – All Rights Reserved  
352-1783-1011041430  
Page 11 of 15  
PART NUMBER:  
± 2g Tri-axis Digital  
Accelerometer Specifications  
KXR94-2353  
Rev. 3  
Nov-2010  
Test Specifications  
!
Special Characteristics:  
These characteristics have been identified as being critical to the customer. Every part is tested to verify its  
conformance to specification prior to shipment.  
Table 8. Test Specifications  
Parameter  
Specification  
Test Conditions  
2048 +/- 130 counts  
25C, Vdd = 3.3 V  
Zero-g Offset @ RT  
Sensitivity @ RT  
Current Consumption -- Operating  
819 +/- 16 counts/g  
25C, Vdd = 3.3 V  
500 <= Idd <= 1400 uA 25C, Vdd = 3.3 V  
36 Thornwood Dr. – Ithaca, NY 14850  
tel: 607-257-1080 – fax:607-257-1146  
www.kionix.com - info@kionix.com  
© 2010 Kionix – All Rights Reserved  
352-1783-1011041430  
Page 12 of 15  
PART NUMBER:  
± 2g Tri-axis Digital  
Accelerometer Specifications  
KXR94-2353  
Rev. 3  
Nov-2010  
Package Dimensions and Orientation  
5 x 5 x 1.2 mm DFN  
+Y  
+X  
+Z  
+Z  
+X  
mm  
Nom  
5.00  
5.00  
1.20  
0.23  
0.50  
0.40  
3.60  
4.30  
inch  
Dimension  
Min  
Max  
Min  
Nom  
0.197  
0.197  
Max  
A
B
C
D
E
F
1.10  
0.18  
1.30  
0.28  
0.043 0.047 0.051  
0.007 0.009 0.011  
0.020  
0.014 0.016 0.018  
0.138 0.142 0.146  
0.165 0.169 0.173  
0.35  
3.50  
4.20  
0.45  
3.70  
4.40  
G
H
All dimensions and tolerances conform to ASME Y14.5M-1994  
When device is accelerated in +X, +Y or +Z direction, the corresponding output will increase.  
36 Thornwood Dr. – Ithaca, NY 14850  
tel: 607-257-1080 – fax:607-257-1146  
www.kionix.com - info@kionix.com  
© 2010 Kionix – All Rights Reserved  
352-1783-1011041430  
Page 13 of 15  
PART NUMBER:  
± 2g Tri-axis Digital  
Accelerometer Specifications  
KXR94-2353  
Rev. 3  
Nov-2010  
Static X/Y/Z Output Response versus Orientation to Earth’s surface (1g):  
Position  
1
2
3
4
5
6
Diagram  
Top  
Bottom  
Bottom  
Top  
X
Y
Z
2048  
counts  
2867  
counts  
2048  
counts  
1229  
counts  
2048  
counts  
2048  
counts  
2867  
counts  
2048  
counts  
1229  
counts  
2048  
counts  
2048  
counts  
2048  
counts  
2048  
2048  
2048  
2048  
2867  
1229  
counts  
counts  
counts  
counts  
counts  
counts  
X-Polarity  
Y-Polarity  
Z-Polarity  
0
+
0
+
0
0
0
-
0
-
0
0
0
0
+
0
0
-
(1g)  
Earth’s Surface  
36 Thornwood Dr. – Ithaca, NY 14850  
tel: 607-257-1080 – fax:607-257-1146  
www.kionix.com - info@kionix.com  
© 2010 Kionix – All Rights Reserved  
352-1783-1011041430  
Page 14 of 15  
PART NUMBER:  
± 2g Tri-axis Digital  
Accelerometer Specifications  
KXR94-2353  
Rev. 3  
Nov-2010  
Revision History  
REVISION DESCRIPTION  
DATE  
Initial Release  
06-Aug-  
2007  
1
Added Special Characteristics designation to property tables. Adjusted current specification to six sigma  
tolerances.  
Changed to new format, widened Zero-g Offset tolerance to 130 counts, updated SPI rate to 5MHz max,  
corrected Bandwidth footnote.  
15-Nov-  
2009  
03-Nov-  
2010  
2
3
"Kionix" is a registered trademark of Kionix, Inc. Products described herein are protected by patents issued or pending. No license is granted by implication or otherwise  
under any patent or other rights of Kionix. The information contained herein is believed to be accurate and reliable but is not guaranteed. Kionix does not assume  
responsibility for its use or distribution. Kionix also reserves the right to change product specifications or discontinue this product at any time without prior notice. This  
publication supersedes and replaces all information previously supplied.  
36 Thornwood Dr. – Ithaca, NY 14850  
tel: 607-257-1080 – fax:607-257-1146  
www.kionix.com - info@kionix.com  
© 2010 Kionix – All Rights Reserved  
352-1783-1011041430  
Page 15 of 15  
厂商 型号 描述 页数 下载

ETC

 		KXR94 [ Accelerometers and Inclinometers ] 2 页

ETC

 		KXR94-1050 2克三轴加速度计产品规格[ 2g Tri-axis Accelerometer Specifications ] 13 页

ETC

 		KXR94-2050 2克三轴加速度计产品规格[ 2g Tri-Axis Accelerometer Specifications ] 11 页

ETC

 		KXR94-2283 2克三轴加速度计产品规格[ 2g Tri-Axis Accelerometer Specifications ] 10 页

ETC

 		KXR94-7050 [ Accelerometers and Inclinometers ] 2 页

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